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Effect of boron incorporation on the lattice parameter and texture of diamond films deposited by chemical vapour deposition on silicon

✍ Scribed by D. Chateigner; F. Brunet; A. Deneuville; P. Germi; M. Pernet; E. Gheeraert; P. Gonon


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
477 KB
Volume
148
Category
Article
ISSN
0022-0248

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