Combined Roles of Ion Bombardment and Electron Emission in Bias-Enhanced Diamond Nucleation on Silicon by Hot Filament Chemical Vapour Deposition

✍ Scribed by Wang, W. L. ;Sánchez, G. ;Polo, M. C. ;Esteve, J.

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 115 KB
• Volume: 161
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(199706)161:2<r3::aid-pssa99993>3.0.co;2-k