Effect of Nucleation Rate on Heteroepitaxial Diamond Growth on Si (100) via Electron-Emission-Enhanced Nucleation by Hot Filament Chemical Vapor Deposition

✍ Scribed by Liao, K. J. ;Wang, W. L. ;Feng, B.

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 322 KB
• Volume: 167
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199805)167:1<117::aid-pssa117>3.0.co;2-#