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Structure estimation of diamond-like carbon films by synchrotron X-ray reflectivity measurement

✍ Scribed by Junji Matsui; Kazunori Fukuda; Ayuko Kamakura; Yoshiyuki Tsusaka; Yasushi Kagoshima; Noriaki Toyoda; Isao Yamada

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
551 KB
Volume
261
Category
Article
ISSN
0168-583X

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## Abstract The non‐destructive characterization of intrinsic stress is very important to evaluate the reliability of devices based on diamond‐like carbon (DLC) films. Whereas the only requirement for the X‐ray diffraction method is a crystalline state of specimen, Raman spectroscopic stress analys