Synchrotron radiation photoelectron spectroscopy and near-edge X-ray absorption fine structure study on oxidative etching of diamond-like carbon films by hyperthermal atomic oxygen

✍ Scribed by Masahito Tagawa; Kumiko Yokota; Akira Kitamura; Koji Matsumoto; Akitaka Yoshigoe; Yuden Teraoka; Kazuhiro Kanda; Masahito Niibe

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 380 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2010.06.030