✦ LIBER ✦

Structural study of diamond-like films onto silicon

✍ Scribed by N.B. Velchev; G.D. Beshkov

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 837 KB
Volume: 10
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(91)90113-a

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✦ Synopsis

Some experimental results related to a structural study of diamond-like films on silicon substrates are reported. Surface analysis techniques such as electron microscopy, transmission electron microscopy and infrared spectroscopy are used and a conclusion is given.

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