Ellipsometric study of diamond-like thin films
β Scribed by E. Pascual; C. Serra; J. Esteve; E. Bertran
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 361 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0257-8972
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π SIMILAR VOLUMES
Some experimental results related to a structural study of diamond-like films on silicon substrates are reported. Surface analysis techniques such as electron microscopy, transmission electron microscopy and infrared spectroscopy are used and a conclusion is given.
A description of an infrared ellipsometerfor the stud 3, of surface and interface phenomena is given. The actual configuration is based on a Fourier transform spectrometer equipped with an ellipsometric' attachment. The attachment is based on the so-called Beattie ellipsometer and consists essential