Ellipsometric characterization of thin films and superlattices

✍ Scribed by J. Bremer; O. Hunderi; Kong Fanping

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 404 KB
• Volume: 5
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(90)90070-r

✦ Synopsis

A description of an infrared ellipsometerfor the stud 3, of surface and interface phenomena is given. The actual configuration is based on a Fourier transform spectrometer equipped with an ellipsometric' attachment. The attachment is based on the so-called Beattie ellipsometer and consists essentially of two ion-etched wire grid polarizers" and a mirror system of unit magnification. In order to ensure equal s and p components, the polarization of the incoming beam is" set at 45 ° with respect to the plane of incidence. The polarization state of the reflected beam is found by measuring the intensity at different azimuthal settings of the analyser. Measurements" on Pt/Al_,O~ superlattices are reported and the data are compared with transfer matrix calculations. This' novel technique combines both the multiplex advantage of Fourier transform spectroscopy and the phase sensitivity of ellipsometry.