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In situ ellipsometric characterization and process control for amorphous thin film deposition

✍ Scribed by R.W. Collins

Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
872 KB
Volume
4
Category
Article
ISSN
0749-6036

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In situ spectroscopic ellipsometry: pres
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✍ Pierre Boher; Jean Louis Stehle πŸ“‚ Article πŸ“… 1996 πŸ› Elsevier Science 🌐 English βš– 499 KB

Principle and limitations of real time spectroscopic ellipsometry are presented. The technical characteristics of the SOPRA ES4G OMA system are summarised and illustrated by practical examples. With 1024 pixels in a spectral range of 260-1060 nm, a reproducibility better than 10 -3 and the possibili