✦ LIBER ✦
Production and characterization of hydrogenated amorphous carbon thin films deposited in methane plasmas diluted by noble gases
✍ Scribed by G. Capote; F.L. Freire Jr.
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 206 KB
- Volume
- 112
- Category
- Article
- ISSN
- 0921-5107
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