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Preparation and in-situ characterization of polycarbosilane thin films by d.c. plasma-enhanced deposition

✍ Scribed by F.S. Ohuchi; T.J. Lin; J.A. Antonelli; D.J. Yang


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
672 KB
Volume
245
Category
Article
ISSN
0040-6090

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