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In and ex situ diagnostics of the growth of α-Ti thin films deposited by plasma-enhanced physical vapour deposition

✍ Scribed by H. Steffen; H. Wulff; A. Lunk

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 513 KB
Volume: 228
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90577-c

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