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Deposition of white diamond thin films by increasing the total pressure in a microwave-plasma-enhanced chemical vapour deposition system

✍ Scribed by S.H. Kim; Y.S. Park; J.-W. Lee

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 488 KB
Volume: 253
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(94)90303-4

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