Ellipsometric characterization of thin f
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J. Bremer; O. Hunderi; Kong Fanping
📂
Article
📅
1990
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Elsevier Science
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English
⚖ 404 KB
A description of an infrared ellipsometerfor the stud 3, of surface and interface phenomena is given. The actual configuration is based on a Fourier transform spectrometer equipped with an ellipsometric' attachment. The attachment is based on the so-called Beattie ellipsometer and consists essential