Color chart for diamond-like carbon films on silicon
โ Scribed by T.J. Moravec
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 116 KB
- Volume
- 70
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.
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The effect of the inclusion of silicon atoms in the network of diamond-like carbon (amorphous carbon and hydrogenated amorphous carbon) is studied. Samples of amorphous hydrogenated CSi are deposited by means of a sputter-assisted plasma chemical vapour deposition system in which a carbon target is