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X-ray photoelectron spectroscopy investigation on the chemical structure of amorphous silicon nitride (a-SiNx)

✍ Scribed by Ingo, G. M.


Book ID
127197124
Publisher
AVS (American Vacuum Society)
Year
1989
Tongue
English
Weight
843 KB
Volume
7
Category
Article
ISSN
0734-2101

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