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An X-ray diffraction study of the amorphous structure of chemically vapor-deposited silicon nitride

✍ Scribed by T. Aiyama; T. Fukunaga; K. Niihara; T. Hirai; K. Suzuki

Book ID: 118330798
Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 341 KB
Volume: 33
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(79)90043-7

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