Low temperature NH3 adsorption on clean amorphous silicon and on crystalline silicon surfaces and nitrogen bonding in hydrogenated amorphous silicon nitride films: A comparative X-ray photoelectron spectroscopy study

✍ Scribed by L Kubler; E.K Hilil; D Bolmont; J.C Peruchetti

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 439 KB
• Volume: 149
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(87)90400-7