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X-ray Photoelectron Spectrometry Depth Profiling of Organic Thin Films Using C 60 Sputtering

✍ Scribed by Chen, Ying-Yu; Yu, Bang-Ying; Wang, Wei-Ben; Hsu, Mao-Feng; Lin, Wei-Chun; Lin, Yu-Chin; Jou, Jwo-Huei; Shyue, Jing-Jong

Book ID
126867793
Publisher
American Chemical Society
Year
2008
Tongue
English
Weight
384 KB
Volume
80
Category
Article
ISSN
0003-2700

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Aluminium nitride thin Ðlms grown at room temperature on degenerate silicon (conducting) substrates have been studied using XPS. The hydrolysis layer at the surface of the AlN was examined using valence band measurements, and the e †ect of 5 kV argon ion milling used to remove the hydrolysis layer w