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Depth resolution of sputter profiling investigated by combined Auger-x-ray analysis of thin films

✍ Scribed by H.W. Etzkorn; J. Kirschner

Publisher
Elsevier Science
Year
1980
Weight
331 KB
Volume
168
Category
Article
ISSN
0029-554X

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Non-uniform sputtering and degradation o
Non-uniform sputtering and degradation of depth resolution during GDOES depth profiling analysis of thin anodic alumina films grown over rough substrates
✍ Shimizu, K.; Habazaki, H.; Skeldon, P.; Thompson, G. E.; Wood, G. C. πŸ“‚ Article πŸ“… 1999 πŸ› John Wiley and Sons 🌐 English βš– 529 KB

Degradation of depth resolution during glow discharge optical emission spectroscopy (GDOES) depth profiling analysis of thin films, formed on relatively rough substrates, has been investigated using preconditioned aluminium substrates of controlled surface roughness. The anodic alumina films, ~120 n