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Thin SiO2Si3N4SiO2 films: Auger depth profile evaluation by means of factor analysis

✍ Scribed by L. Gonzo; F. Marchetti; M. Sarkar

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 299 KB
Volume: 228
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90566-8

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