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Strain distribution in thin aluminum films using x-ray depth profiling

✍ Scribed by Doerner, M. F.; Brennan, S.

Book ID: 125497689
Publisher: American Institute of Physics
Year: 1988
Tongue: English
Weight: 757 KB
Volume: 63
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.340503

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