X-ray phase analysis with depth profiling for thin films

X-ray Photoelectron Spectroscopy Depth P

X-ray Photoelectron Spectroscopy Depth Profiling of Aluminium Nitride Thin Films

✍ Butcher, K. S. A.; Tansley, T. L.; Li, Xin 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 359 KB 👁 2 views

Aluminium nitride thin Ðlms grown at room temperature on degenerate silicon (conducting) substrates have been studied using XPS. The hydrolysis layer at the surface of the AlN was examined using valence band measurements, and the e †ect of 5 kV argon ion milling used to remove the hydrolysis layer w

Depth profiling of thin ITO films by gra

Depth profiling of thin ITO films by grazing incidence X-ray diffraction

✍ D.G. Neerinck; T.J. Vink 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 726 KB

Depth resolution of sputter profiling in

Depth resolution of sputter profiling investigated by combined Auger-x-ray analysis of thin films

✍ H.W. Etzkorn; J. Kirschner 📂 Article 📅 1980 🏛 Elsevier Science ⚖ 331 KB

Thin Film Analysis by X-Ray Scattering (

Thin Film Analysis by X-Ray Scattering (BIRKHOLZ:THIN FILM X-RAY O-BK) || Line Profile Analysis

✍ Birkholz, Mario 📂 Article 📅 2006 🏛 Wiley-VCH Verlag GmbH & Co. KGaA 🌐 German ⚖ 810 KB

With contributions by Paul F. Fewster and Christoph Genzel While X-ray diffraction investigation of powders and polycrystalline matter was at the forefront of materials science in the 1960s and 70s, high-tech applications at the beginning of the 21st century are driven by the materials science of t

Auger and X-ray photoelectron spectrosco

Auger and X-ray photoelectron spectroscopic depth profiling techniques applied to ultra-thin titanium films

✍ C.P. Lofton; W.E. Swartz Jr. 📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 457 KB

Thin Film Analysis by X-Ray Scattering (

Thin Film Analysis by X-Ray Scattering (BIRKHOLZ:THIN FILM X-RAY O-BK) || Identification of Chemical Phases

✍ Birkholz, Mario 📂 Article 📅 2006 🏛 Wiley-VCH Verlag GmbH & Co. KGaA 🌐 German ⚖ 526 KB

With contributions by Paul F. Fewster and Christoph Genzel While X-ray diffraction investigation of powders and polycrystalline matter was at the forefront of materials science in the 1960s and 70s, high-tech applications at the beginning of the 21st century are driven by the materials science of t