✦ LIBER ✦

Very high rate reactive sputtering of TiN, ZrN and HfN

✍ Scribed by William D. Sproul

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Reactive and non-reactive high rate sput

✍ K. Fuchs; P. Rödhammer; E. Bertel; F.P. Netzer; E. Gornik 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 813 KB

Monte Carlo simulation of high rate reac

✍ C.D. Tsiogas; J.N. Avaritsiotis 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 815 KB

Structure of TiN coatings deposited at r

✍ V. Valvoda; R. Kužel Jr.; R. Černý; J. Musil 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 539 KB

Reactive high rate D.C. sputtering: Depo

✍ S. Schiller; G. Beister; W. Sieber 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 503 KB

The effect of N2 partial pressure, depos

✍ W.D. Sproul; P.J. Rudnik; M.E. Graham 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 481 KB

5089. Coating of preformed pieces with T

📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 275 KB