✦ LIBER ✦
Reactive high rate D.C. sputtering: Deposition rate, stoichiometry and features of TiOx and TiNx films with respect to the target mode
✍ Scribed by S. Schiller; G. Beister; W. Sieber
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 503 KB
- Volume
- 111
- Category
- Article
- ISSN
- 0040-6090
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