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Reactive and non-reactive high rate sputter deposition of Tungsten carbide

✍ Scribed by K. Fuchs; P. Rödhammer; E. Bertel; F.P. Netzer; E. Gornik


Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
813 KB
Volume
151
Category
Article
ISSN
0040-6090

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