✦ LIBER ✦

Reactive high rate sputtering of oxides

✍ Scribed by W.D. Münz; J. Heimbach; S.R. Reineck

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Reactive high rate d.c. sputtering of ox

✍ M. Scherer; P. Wirz 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 342 KB

Monte Carlo simulation of high rate reac

✍ C.D. Tsiogas; J.N. Avaritsiotis 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 815 KB

High rate reactive sputtering process co

✍ William D. Sproul 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 626 KB

High rate reactive sputtering of MoNx co

✍ Paul J. Rudnik; Michael E. Graham; William D. Sproul 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 499 KB

Very high rate reactive sputtering of Ti

✍ William D. Sproul 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 359 KB

Reactive and non-reactive high rate sput

✍ K. Fuchs; P. Rödhammer; E. Bertel; F.P. Netzer; E. Gornik 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 813 KB