✦ LIBER ✦

High rate reactive sputtering process control

✍ Scribed by William D. Sproul

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A control process for stable operation o

📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 246 KB

Reactive high rate sputtering of oxides

✍ W.D. Münz; J. Heimbach; S.R. Reineck 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 360 KB

High rate reactive sputtering of MoNx co

✍ Paul J. Rudnik; Michael E. Graham; William D. Sproul 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 499 KB

Reactive high rate d.c. sputtering of ox

✍ M. Scherer; P. Wirz 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 342 KB

Dynamic modeling of the process control

✍ M. Moradi; C. Nender; H.-O. Blom; S. Berg 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 256 KB

Active process control of reactive sputt

✍ A.A. Voevodin; P Stevenson; C Rebholz; J.M. Schneider; A Matthews 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 733 KB