A control process for stable operation of a high rate dc reactive planar magnetron sputtering system: R W Lewin, A G Spencer and R P Howson, Department of Physics, Loughborough University of Technology, Ashby Road, Loughborough, Leicestershire LE11 3TU, UK

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 246 KB
• Volume: 38
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(88)90512-x