High rate dc magnetron sputtering—a review: R P Howson, A G Spencer and R W Lewin, Department of Physics, Loughborough University of Technology, Ashby Road, Loughborough, Leicestershire LE 11 3TU, UK

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 126 KB
• Volume: 38
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(88)90511-8