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Active process control of reactive sputter deposition

✍ Scribed by A.A. Voevodin; P Stevenson; C Rebholz; J.M. Schneider; A Matthews

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Dynamic modeling of the process control

✍ M. Moradi; C. Nender; H.-O. Blom; S. Berg 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 256 KB

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✍ K. Fuchs; P. Rödhammer; E. Bertel; F.P. Netzer; E. Gornik 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 813 KB

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✍ A.A. Karim; C. Deshpandey; H.J. Doerr; R.F. Bunshah 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 568 KB