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Reactive high rate d.c. sputtering of oxides

✍ Scribed by M. Scherer; P. Wirz

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Monte Carlo simulation of high rate reac

✍ C.D. Tsiogas; J.N. Avaritsiotis 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 815 KB

Reactive high rate sputtering of oxides

✍ W.D. Münz; J. Heimbach; S.R. Reineck 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 360 KB

High rate d.c. reactively sputtered meta

✍ G.L. Harding 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 445 KB

High rate reactive sputtering process co

✍ William D. Sproul 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 626 KB

High rate reactive sputtering of MoNx co

✍ Paul J. Rudnik; Michael E. Graham; William D. Sproul 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 499 KB

Properties of cadmium stannate thin film

✍ S. Schiller; G. Beister; E. Buedke; H.-J. Becker; H. Schicht 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 373 KB