Structure of TiN coatings deposited at relatively high rates and low temperatures by magnetron sputtering

✍ Scribed by V. Valvoda; R. Kužel Jr.; R. Černý; J. Musil

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 539 KB
• Volume: 156
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(88)90282-9