Structure of TiN coatings deposited at relatively high rates and low temperatures by magnetron sputtering: V Valvoda et al,Thin Solid Films,156, 1988, 53–63

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 152 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90755-0