✦ LIBER ✦
5089. Coating of preformed pieces with TiN by high rate sputtering: WD Münz and G Heβberger Vakuum Technik, 30 (3) 1981, 78–87
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 275 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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