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Variable energy r.f. quadrupole for high-energy ion implantation

✍ Scribed by Junya Ito; Katsumi Tokiguchi; Kensuke Amemiya; Noriyuki Sakudo; Satoru Yamada; Yasuo Hirao; Noboru Tokuda

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
406 KB
Volume
66
Category
Article
ISSN
0257-8972

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