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High-energy ion implantation in polymer films

✍ Scribed by L Ya Alimova; IE Djamaletdinova; TS Pugacheva; IE Ilicheva

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
310 KB
Volume
43
Category
Article
ISSN
0042-207X

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For the simulation of high ener~', high fluence implantations, dynamic codes are necessary which take into account the mod!fication of the substance due to the presence of the implants" and due to collisional effects. In the present paper, we give a brief description of such a binapy collision simul