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UV-nanoimprint lithography using an elementwise patterned stamp

✍ Scribed by Jun-ho Jeong; Young-suk Sim; Hyonkee Sohn; Eung-sug Lee

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 420 KB
Volume: 75
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.04.003

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## Abstract The fabrication of flexible surfaces with a combination of ultrahydrophobic and hydrophilic properties at alternating locations by UV NIL is reported. A new method for master fabrication based on nanoimprinting combined with photolithography is described. The master is used for a double