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Nanoscale patterning with the double-layered soft cylindrical stamps by means of UV-nanoimprint lithography

✍ Scribed by SooYeon Park; KeeBong Choi; GeeHong Kim; JaeJong Lee


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
471 KB
Volume
86
Category
Article
ISSN
0167-9317

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