A step-and-repeat UV-nanoimprint lithography process using an elementwise patterned stamp

✍ Scribed by Jun-ho Jeong; Ki-don Kim; Young-suk Sim; Hyonkee Sohn; Eung-sug Lee

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 511 KB
• Volume: 82
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2005.07.013