Wafer deformation in ultraviolet-nanoimprint lithography using an element-wise patterned stamp

✍ Scribed by Young-suk Sim; Ki-don Kim; Jun-ho Jeong; Hyonkee Sohn; Eung-sug Lee; Sang-chan Lee

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 368 KB
• Volume: 82
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2005.05.004