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Unambiguous determination of thickness and dielectric function of thin films by spectroscopic ellipsometry

✍ Scribed by H. Arwin; D.E. Aspnes

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 861 KB
Volume: 113
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(84)90019-1

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