Spectroscopic ellipsometry measurements of thin metal films
β Scribed by Tompkins, Harland G.; Tasic, Sonja; Baker, Jeff; Convey, Diana
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 151 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0142-2421
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β¦ Synopsis
Optical methods are used to determine the thickness of thin metal films, with emphasis on spectroscopic ellipsometry and transmission. We discuss the conditions where this is possible and how to determine the optical constants for the material. The determination of the thickness of each of two metals in a bimetallic stack is discussed. Finally, by measuring thickness with these methods and measuring weight gain, we determine the density of platinum deposited by evaporation and deposited by a simple sputter deposition method. Explicitly, one of the results is that the determined optical constants depend on the deposition method. This implies that, with only a few exceptions, one must determine the optical constants of the material of interest, and that it is inappropriate to use values from another source such as a handbook or from another investigator. The resulting optical constants in this work suggest that the microstructure of the platinum films from the two different methods will not be the same, and x-ray diffraction and sheet resistance measurements verify that this is the case. Specifically, the significantly lower extinction coefficient of the sputter-deposited films correlates with a higher sheet resistance.
π SIMILAR VOLUMES
Spectroscopic ellipsometry has been used to determine the optical constants-complex dielectric constant (e\* = e 1 + e 2 ), refractive index (n), extinction coefficient (k), absorption coefficient (a) and normal incidence reflectivity (R)-of two-source vacuum-evaporated polycrystalline Cd 1 Γx Zn x
Stoichiometric Ba x Sr 1Γx TiO 3 (BST) thin films with various values of x were prepared on Si(100) substrates by the sol-gel method. The influence of Sr content on the structure and the optical properties was studied by X-ray diffraction (XRD) and spectroscopic ellipsometry (SE) in the UV-visible r
Cd 0.96 Zn 0.04 Te thin films are deposited onto well cleaned glass substrates (Corning 7059) kept at room temperature by vacuum evaporation and the films are annealed at 423 K. Rutherford Backscattering Spectrometry and X-ray diffraction techniques are used to determine the thickness, composition a