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Spectroscopic Ellipsometry of BaxSr1?xTiO3 Thin Films Prepared by the Sol-Gel Method

✍ Scribed by Yang, Sheng-Hong ;Mo, Dang ;Tian, Hu-Yong ;Luo, Wei-Gen ;Pu, Xing-Hua ;Ding, Ai-Li

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 107 KB
Volume: 191
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(200206)191:2<605::aid-pssa605>3.0.co;2-p

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✦ Synopsis

Stoichiometric Ba x Sr 1Àx TiO 3 (BST) thin films with various values of x were prepared on Si(100) substrates by the sol-gel method. The influence of Sr content on the structure and the optical properties was studied by X-ray diffraction (XRD) and spectroscopic ellipsometry (SE) in the UV-visible region. The measured SE spectra were analyzed with an appropriate procedure to accurately determine the thickness and the optical constants of thin films. It has been found that the optical constants of the BST films are functions of the film composition. The optical bandgap energy increases with the increasing of Sr content.

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