Ultra-shallow junction by laser annealing: Integration issues and modelling

✍ Scribed by Antonino La Magna; Paola Alippi; Ioannis Deretzis; Vittorio Privitera; Guglielmo Fortunato; Luigi Mariucci; Angelo Magrì; Edouard Monakhov; Bengt Svensson

• Book ID: 103861497
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 822 KB
• Volume: 253
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2006.10.004