Merits and demerits of light absorbers for ultra-shallow junction formation by green laser annealing

✍ Scribed by Akira Matsuno; Eisuke Takii; Takanori Eto; Ken-ichi Kurobe; Kentaro Shibahara

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 222 KB
• Volume: 237
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.04.088