✦ LIBER ✦
Ultra-shallow junction formation by excimer laser annealing and low energy (<1 keV) B implantation: A two-dimensional analysis
✍ Scribed by G. Fortunato; L. Mariucci; M. Stanizzi; V. Privitera; S. Whelan; C. Spinella; G. Mannino; M. Italia; C. Bongiorno; A. Mittiga
- Book ID
- 114165173
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 353 KB
- Volume
- 186
- Category
- Article
- ISSN
- 0168-583X
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