Nondestructive evaluation of as-implanted and annealed ultra shallow junctions by photothermal and photoluminescence heterodyne techniques

✍ Scribed by H.D. Geiler; H. Karge; M. Wagner; W. Lerch; S. Paul

• Book ID: 103860242
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 150 KB
• Volume: 237
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.04.074