✦ LIBER ✦

Ultra low energy (100–2000 eV) boron implantation into crystalline and silicon-preamorphized silicon

✍ Scribed by A. Bousetta; J.A. Van den Berg; R. Valizadeh; D.G. Armour; P.C. Zalm

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

RTP shallow junction formation of low en

✍ Vijay K. Basra; Daniel F. Downey 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 230 KB

Modelisation of boron diffusion from ult

✍ L. Ihaddadene-Le Coq; J. Marcon; A. Dush-Nicolini; K. Masmoudi; K. Ketata 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 270 KB

Diffusion simulations of boron implanted

✍ L. Ihaddadene-Le Coq; J. Marcon; A. Dush-Nicolini; K. Masmoudi; K. Ketata 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 282 KB

Atomic transport properties and electric

✍ V Privitera; E Napolitani; F Priolo; S Moffatt; A La Magna; G Mannino; A Carnera 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 368 KB

Shallow junction formation with boron fl

✍ Zhiheng Lu; Chaoming Zhang; Sujie Li; Yan Luo; Huixing Zhang 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 426 KB

Computer simulation studies of low energ

✍ Konrad Gärtner; Mirko Nitschke; Wolfgang Eckstein 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 884 KB