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Computer simulation studies of low energy B implantation into amorphous and crystalline silicon

✍ Scribed by Konrad Gärtner; Mirko Nitschke; Wolfgang Eckstein


Book ID
113284490
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
884 KB
Volume
83
Category
Article
ISSN
0168-583X

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